EPX500L Dry Pump 400V A41951004
EPX500L Dry Pump 400V A41951004 EPX500L Dry Pump EPX Vacuum Dry Pumps EDWARDS Semiconductor Dry Pumps Kuala Lumpur (KL), Malaysia, Selangor, Sri Petaling Distributor, Supplier, Supply, Supplies | Glovac Sdn Bhd
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Overview:
The EPX series uses a unique, patented, single-shaft regenerative/Holweck® stage mechanism that makes them capable of pumping from atmosphere to ultimate pressures of < 1x10-4 mbar or < 1x10-6mbar depending on model. They are ideal for applications where a better base pressure is required than can be delivered by a typical primary pump and where otherwise a turbomolecular pump and primary pump would be required and also for applications that cycle frequently from atmosphere to low pressures as they can operate continuously at all inlet pressures.

Features & Benefits:
Compact footprint – the EPX is more compact than the equivalent turbomolecular pump and primary pump combination. 
Low cost of ownership – zero routine maintenance with a 5 year service interval. 
Unique patent protected pumping mechanism – the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. No separate “rough pumping” required. 
Ultra clean mechanism – EPX pumps have no grease or oil under vacuum and present no other source of potential contamination. 
Extremely reliable – based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump. 
Water cooled – low environmental heat load 
Low noise and vibration – better working environment. Ideal for vibration sensitive environments.

Technical Data:
Peak speed 500 m3h-1
  295 ft3min-1
  8338 lmin-1
Ultimate vacuum  
  <1 x 10-6 mbar
  <7 x 10-7 Torr
  <1 x 10-4 Pa
Warm-up time (to nominal performance) 30 min
Inlet flange ISO160
Outlet flange NW25
Noise <59 dB(A)
Minimum cooling water flow rate 2 lmin-1
Cooling water temperature 15 – 35 °C
Electrical Supply 200/208 V, 50/60 Hz 3 phase
Power at ultimate 1.4 kW
Rated motor power 3.0 kW
TIM C3
Weight 45.2 kg

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