GX100L Dry Pump 380-460 V 50/60 Hz A54710959
GX100L Dry Pump 380-460 V 50/60 Hz A54710959 GX100L Dry Pump GX Dry Pump EDWARDS Semiconductor Dry Pumps Kuala Lumpur (KL), Malaysia, Selangor, Sri Petaling Distributor, Supplier, Supply, Supplies | Glovac Sdn Bhd
The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Features & Benefits:
  • Reduced Cost of Ownership
    • Up to a 50% reduction in utilities cost compared to iL/iH drypumps
    • No preventative maintenance 
  • Flexible Installation Options
    • Small and light for easy installation
    • On-tool, close proximity, or remote
  • Possible Tool Throughput Improvements
    • One of the fastest loadlock pumps available
  • Consistent Pumping Performance Globally
    • Pumping speed identical at 50 and 60 Hz
  • Reduced Ambient Noise
    • Only 55 dB(A)
  • Wide Range of Peak Speed
    • 100, 300, 600 and 800 m3h-1

Technical Data:
Peak speed 105 m3h-1
  62 ft3min-1
  1750 lmin-1
Ultimate pressure 5 x 10-3 mbar
  3.75 x 10-3 Torr
  0.5 Pa
Power at 700 Torr exhaust  
Ultimate 1 kW
AUC (Active Utility Controller) 0.05 kW
Water *  
Water inlet 1 slm
Nitrogen 0 slm
Installation Details  
Footprint (excluding exhaust) 0.20 m2
Weight 120 kg
Inlet connection ISO 63
Outlet connection NW25
Noise at ultimate <55 dB(A)

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