iGX600L Dry pump 380-460V 50/60 Hz A54630959
iGX600L Dry pump 380-460V 50/60 Hz A54630959 iGX600L Dry Pump iGX Dry Pumps EDWARDS Semiconductor Dry Pumps Kuala Lumpur (KL), Malaysia, Selangor, Sri Petaling Distributor, Supplier, Supply, Supplies | Glovac Sdn Bhd
Quantity
Overview:
The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. 
  
iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. 
  
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Features & Benefits:
  • Reduced Cost of Ownership
    • Up to a 50% reduction in utilities cost compared to iL/iH drypumps
    • No preventative maintenance
  • Flexible Installation Options
    • Small and light for easy installation
    • On-tool, close proximity, or remote
  • Possible Tool Throughput Improvements
    • One of the fastest load lock pumps available
  • Consistent Pumping Performance Globally
    • Pumping speed identical at 50 and 60 Hz
  • Reduced Ambient Noise
    • Only 55 dB(A)
  • Wide Range of Peak Speed
    • 100, 300, 600 and 800 m3h-1

Technical Data:
Peak speed 620 m3h-1
  365 cfm
  10333 l min-1
Ultimate pressure 7.00E-04 mbar
  5.25E-04 Torr
  0.07 Pa
Power at 700 Torr exhaust  
Ultimate 1.6 kW
AUC (Active Utility Controller) 0.05 kW
Water inlet* 2 slm
Nitrogen 0 slm
Footprint excluding exhaust 0.20 m2
Weight 220 kg
Inlet connection ISO100
Outlet connection NW25
Noise at ultimate < 55 dB(A)

  
* Requires constant flow valve accessory.

Please leave your enquiry here, we will reply as soon as possible.


*only support gif, jpeg, jpg, png, pdf
Switch To Desktop Version