EPX180N Dry pump 208V MCM TIM 3/8 water connector A41942712
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Overview:
The EPX series uses a unique, patented, single-shaft regenerative/Holweck® stage mechanism that makes them capable of pumping from atmosphere to ultimate pressures of < 1x10-4 mbar or < 1x10-6mbar depending on model. They are ideal for applications where a better base pressure is required than can be delivered by a typical primary pump and where otherwise a turbomolecular pump and primary pump would be required and also for applications that cycle frequently from atmosphere to low pressures as they can operate continuously at all inlet pressures.
Features & Benefits:
Compact footprint – the EPX is more compact than the equivalent turbomolecular pump and primary pump combination.
Low cost of ownership – zero routine maintenance with a 5 year service interval.
Unique patent protected pumping mechanism – the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. No separate “rough pumping” required.
Ultra clean mechanism – EPX pumps have no grease or oil under vacuum and present no other source of potential contamination.
Extremely reliable – based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
Water cooled – low environmental heat load
Low noise and vibration – better working environment. Ideal for vibration sensitive environments.
Technical Data:
The EPX series uses a unique, patented, single-shaft regenerative/Holweck® stage mechanism that makes them capable of pumping from atmosphere to ultimate pressures of < 1x10-4 mbar or < 1x10-6mbar depending on model. They are ideal for applications where a better base pressure is required than can be delivered by a typical primary pump and where otherwise a turbomolecular pump and primary pump would be required and also for applications that cycle frequently from atmosphere to low pressures as they can operate continuously at all inlet pressures.
Features & Benefits:
Compact footprint – the EPX is more compact than the equivalent turbomolecular pump and primary pump combination.
Low cost of ownership – zero routine maintenance with a 5 year service interval.
Unique patent protected pumping mechanism – the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. No separate “rough pumping” required.
Ultra clean mechanism – EPX pumps have no grease or oil under vacuum and present no other source of potential contamination.
Extremely reliable – based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
Water cooled – low environmental heat load
Low noise and vibration – better working environment. Ideal for vibration sensitive environments.
Technical Data:
| Peak speed | 170 m3h-1 |
| 105 ft3min-1 | |
| 2835 lmin-1 | |
| Ultimate vacuum | |
| <1 x 10-4 mbar | |
| <7.5 x 10-5 Torr | |
| <1 x 10-2 Pa | |
| Warm-up time (to nominal performance) | 30 min |
| Inlet flange | ISO63 |
| Outlet flange | NW25 |
| Noise | <59 dB(A) |
| Water connectors | 3/8 in Quick |
| Minimum cooling water flow rate | 2 lmin-1 |
| Cooling water temperature | 15 – 35 °C |
| Nitrogen supply interface | 1/4 in (6.5 mm) tube |
| Nitrogen supply pressure | 3 x 105 – 7 x 105 pa |
| Minimum nitrogen purity | 99.95% |
| Electrical Supply | 200/208 V, 50/60 Hz 3 phase |
| Power at ultimate | 1.4 kW |
| Rated motor power | 3.0 kW |
| TIM | C3 |
| Weight | 43.5 kg |
