GX600L Dry Pump 380-460 V 50/60 Hz A54730959
Quantity
Overview:
The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Features & Benefits:
Technical Data:
* Requires Constant Flow Valve accessory
The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Features & Benefits:
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Reduced Cost of Ownership
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Up to a 50% reduction in utilities cost compared to iL/iH drypumps
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No preventative maintenance
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Flexible Installation Options
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Small and light for easy installation
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On-tool, close proximity, or remote
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Possible Tool Throughput Improvements
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One of the fastest loadlock pumps available
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Consistent Pumping Performance Globally
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Pumping speed identical at 50 and 60 Hz
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Reduced Ambient Noise
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Only 55 dB(A)
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Wide Range of Peak Speed
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100, 300, 600 and 800 m3h-1
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Technical Data:
| Performance | |
| Peak speed | 620 m3h-1 |
| 365 ft3min-1 | |
| 10333 lmin-1 | |
| Ultimate pressure | 7 x 10 -4 mbar |
| 5.25 x 10-4 Torr | |
| 0.07 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1.6 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water * | |
| Water inlet | 2 slm |
| Nitrogen | 0 slm |
| Installation Details | |
| Footprint (excluding exhaust) | 0.20 m2 |
| Weight | 220 kg |
| Inlet connection | ISO 100 |
| Outlet connection | NW25 |
| Noise at ultimate | <55 dB(A) |
* Requires Constant Flow Valve accessory
